Using the Plasmability CVD growth system, we successfully achieved nitrogen incorporation levels under 1 ppb in single crystal diamond samples with a thickness of 0.5 mm. Nitrogen content analysis was measured utilizing a high-precision Bruker EMXmicro Electron Paramagnetic Resonance (EPR) instrument and Photoluminescence (PL) spectroscopy (Renishaw InVia Raman confocal microspectrometer).
The focus of our EPR analysis was primarily on single substitutional nitrogen (Ns0), the dominant defect in CVD diamond. EPR is a bulk technique that can provide average Ns0 concentrations ([Ns0]) with a sensitivity down to ~ 0.05 ppb (parts per billion). This is accomplished by comparing the strength of the Ns0 EPR signal from a specific sample to that of a reference sample with a known concentration.